Table 1. Parameters of the TXM (Zernike phase contrast) measurements for the low-resolution and high-resolution setups.
| Parameter | TXM low resolution | TXM high resolution |
|---|---|---|
| Sample | Tardigrade | Spider hair |
| Energy | 11 keV | 11 keV |
| Sample–detector distance | 20.4 m | 20.4 m |
| FZP diameter | 150 µm | 120 µm |
| FZP d r | 50 nm | 30 nm |
| Theoretical resolution limit | 30.5 nm | 18.3 nm |
| Effective pixel size CMOS | 21.4 nm | 10 nm† |
| Effective pixel size LAMBDA | 181 nm | 85 nm |
| Magnification | 303 | 647 |
| Half-period resolution CMOS (3D) | 98 nm | – |
| Scan time at resolution limit (3D) | – | 60 s |
†
This value was calculated from the parameters and not experimentally verified.