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Process parameters of BKM and LHL diffusion processes for p-type mc-Si solar cells.
| Condition | Temperature (°C) | POCl3 (sccm) | O2 (sccm) | N2 (sccm) | |
|---|---|---|---|---|---|
| BKM | 1st step | 810 | 1600 | 800 | 30,000 |
| LHL | 1st step | 810 | 1900 | 800 | 30,000 |
| 2nd step | 825 | 2100 | 800 | 30,000 | |
| Last step | :0 | 1600 | 800 | 30,000 | |
