Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) The opening width of the etched tee-pee through a hole in 30 nm Cr mask ablated at different pulse energies . Top-insets shows SEM image after Cr mask removal following a 10 min plasma etch. (b) Nano-structures formed below Cr mask in the under-etch region. Etched by SF6:CHF3:O2 at 5:1:1 flow rate ratio.
