Figure 6.
(a) Top-view SEM image of Al1−xScxN HBAR device; (b) S11 response of HBAR devices with AlN and Al0.9Sc0.1N films; Mason equivalent circuit fitting of (c) AlN and (d) Al0.9Sc0.1N on a 200 MHz span.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.