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The measured and corrected d33 of AlN and Al0.9Sc0.1N films from synchrotron XRD, PM300, HBAR and theoretical calculation.
| Material | Method | Measured d33 (pC/N) | Corrected d33 (pC/N) | Theoretical Calculated d33 (pC/N) |
|---|---|---|---|---|
| AlN | Synchrotron XRD | 3.54 | 4.76 | 5.38 |
| PM300 | 6.33 | 4.29 | ||
| HBAR | 4.22 | 5.43 | ||
| Al0.9Sc0.1N | Synchrotron XRD | 5.58 | 7.79 | 7.89 |
| PM300 | 8.96 | 7.03 | ||
| HBAR | 6.04 | 8.25 |
