Table 2.

d₃₃ comparison with other reports.

Material	d33 (pC/N)	Reference	Material	d33 (pC/N)	Reference
AlN	4.53	[24]	Al0.9Sc0.1N	7.5	[8]
AlN	4.76	Our work	Al0.9Sc0.1N	7.79	Our work
AlN	4.9	[25]	Al0.88Sc0.12N	7.9	[43]
AlN *	5.0	[44]	Al0.85Sc0.15N	7.92	[22]
AlN	5.1	[26]	Al0.83Sc0.17N	9.5	[43]
AlN *	5.1	[45]	Al0.8Sc0.2N	11.5	[8]
AlN	5.53	[46]	Al0.75Sc0.25N	13.2	[47]

* Obtained by theoretical calculations.