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. 2023 Mar 15;615(7952):411–417. doi: 10.1038/s41586-023-05724-2

Extended Data Fig. 1. Scanning electron microscopy image of an heterogeneous Si3N4-LiNbO3 waveguide.

Extended Data Fig. 1

Original, unprocessed SEM data used to prepare Fig. 1b of the main text.