Fig. 1. Representative examples of recently demonstrated silicon photonic MEMS.
Individual components based on dedicated processes on silicon-on-insulator wafers include a tunable couplers44, b phase shifters42, and c ultrasound sensors50, and silicon photonic MEMS based on specifically developed microfabrication processes using multiple layers have shown d beam steering for 3D imaging41 and e, f large-scale photonic switch matrices for optical circuit switching in datacentres40,46. (Permissions: a Adapted with permission from ref. 44 © The Optical Society. b Adapted with permission from ref. 42 © The Optical Society. c Adapted with permission from ref. 50 © Springer Nature. d Adapted from ref. 41 under creative commons license CC BY 4.0. e Adapted with permission from ref. 40 © The Optical Society. f Adapted from ref. 46 under creative commons license CC BY 4.0)