1st step	−50 °C	150 mTorr	2 h
2nd step	−40 °C	100 mTorr	2 h
3rd step	−30 °C	100 mTorr	2 h
4th step	−20 °C	50 mTorr	2 h
5th step	−10 °C	50 mTorr	2 h
6th step	−5 °C	50 mTorr	2 h
7th step	0 °C	50 mTorr	2 h
8th step	+10 °C	50 mTorr	2 h
9th step	+20 °C	50 mTorr	4 h