Fig. 16. Schematic demonstrating the required instrumentation and the geometrical layout of the RHEED technique. Schematic showing (a) the layout of the RHEED, including the Ewald sphere and the diffracted electron beam, and (b) the resultant diffraction spacing on the cathodoluminescent screen, with the Laue ring trace. The representative RHEED pattern is shown together with the Laue ring for (c) an electron beam aligned with a crystallographic direction of the substrate, (d) demonstration of the types of substrate holder movements used to align the substrate, and (e) the pattern for a misaligned electron beam.
