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. 2023 Apr 5;28(4):040901. doi: 10.1117/1.JBO.28.4.040901

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Published by SPIE under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Fig. 7 — FPI. (a) Working mechanism of an FPI system (adapted from Ref. 150). (b) A compact FPI chip that is driven by electrostatic actuation (reproduced from Ref. 151).