Figure 1.

Design aspects of FEBID-based Co₃Fe MFM tips. (a) tip-less SS-CL with a flexible electrode system (yellow) to adapt to different AFM probe concepts (Nice CL, GETec Microscopy) [39], revealing a nano-tip at the very end (red). While (b) shows a single pillar, produced by a static e-beam (5 keV, 5.2 pA, same scale bar as in (e)), (c) gives a 3D-nano printed Co₃Fe hollow cone (20 keV, 53 pA, 1250 s) following a previous CAFM concept [24]. (d) shows the α-pillar patterning scheme, where the initial BB of 200 nm changes stepwise to in-focus conditions. (e) shows the result for such a sequence, with the same TETs as for the hollow cone in (c) (ETs were 500-250-200-150-100-50 s). (f) shows a SEM image of an α-pillar apex (r~10 nm) in direct comparison to a commercial MFM tip (MESP, Bruker), where the radius reduction is evident (g) (same scale bar as in (f)).