Figure 2.

(a) Co₃Fe α-pillar shapes for varying primary electron energies (increasing from left to right), fabricated at high (100 pA, upper row) and low beam currents (10 pA, lower row). The same patterning sequence was used for all fabricated α-pillars with a total exposure time of 750 s, as described in the main text. While yellow arrows indicate beam-blur steps in the morphology, red arrows indicate the indent formation. (b) shows the current dependent evolution of apex radii (top triangles) and base widths (bottom squares) for α-pillars produced at 20 keV, which were further used for MFM measurements.