Figure 2.

Geometry and simulation results of the silicon meta-atom. (a) Meta-atom geometrical parameters. (b) Simulated transmission T (blue solid line) and reflection R (red dashed line) of a meta-atom with disk radius r = 0.2 μm. The red (blue) shaded region signifies probe (pump) resonance. (c) Simulated phase due to the meta-atoms at probe wavelength λ_probe = 1.31 μm and calculated force experienced by the meta-atoms at pump wavelength λ_pump = 1.55 μm and pump intensity I_p = 1 μW/μm², as a function of disk radius r. (d) Numerical simulation of the deformation Δz for meta-atoms in a 1D array in the presence of pump light with I_p = 110 μW/μm².