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. 2023 Jan 19;3(1):20210233. doi: 10.1002/EXP.20210233

FIGURE 5.

FIGURE 5

(A) Processes of the etching reaction between hydrogen atoms and graphene edges. (B) Schematic diagram of the evolution of graphene edges from round to hexagonal pits. (C) Temperature‐dependent etching rates for trilayer graphene with hydrogen plasma. Reproduced with permission.[ 100 ] Copyright 2018, Springer. (D) Schematic of multi‐step processing of graphene with EBL, oxygen‐plasma, and anisotropic hydrogen plasma etching. Reproduced with permission.[ 120 ] Copyright 2011, Wiley‐VCH. (E) Scanning tunneling microscopy image of a monolayer graphene with hexagonal pit. Inset shows atomic resolution image of the edge. (F) The Fourier transform spectrum (power spectrum) of the corresponding sample. Reproduced with permission.[ 107 ] Copyright 2010, Wiley‐VCH. (G) Honeycomb‐like graphene networks produced with hydrogen plasma etching. Reproduced with permission.[ 120 ] Copyright 2011, Wiley‐VCH