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. 2023 Jun 2;25(2):19. doi: 10.1007/s10544-023-00657-z

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© The Author(s) 2023

Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 7 — System calibration curves for the normally-closed flow controller and pressure controller. a Flow rate calibration for liquid flowing through the flow controller with applied voltage. b Flow rate calibration for air flowing through the controller. The data for a and b were collected by connecting the flow controller between the liquid reservoir and the waste reservoir connected to the vacuum pump. c Vacuum calibration with applied voltage for air flowing through the pressure controller. The system shows good reproducibility