Figure 7.

Displacement of silicon cantilevers with different oscillation amplitudes. On the left, the cantilevers have maximum amplitudes for lengths of (a) $l=5.7 \mathrm{m}\mathrm{m}$, (c) $l=9.0 \mathrm{m}\mathrm{m}$, (e) $l=12.1 \mathrm{m}\mathrm{m}$, (g) $l=15.4 \mathrm{m}\mathrm{m}$, (i) $l=18.5 \mathrm{m}\mathrm{m}$, (k) $l=21.8 \mathrm{m}\mathrm{m}$. On the right, the cantilevers have minimum amplitudes for lengths of (b) $l=7.2 \mathrm{m}\mathrm{m}$, (d) $l=10.2 \mathrm{m}\mathrm{m}$, (f) $l=13.7 \mathrm{m}\mathrm{m}$, (h) $l=16.9 \mathrm{m}\mathrm{m}$, (j) $l=20.2 \mathrm{m}\mathrm{m}$, (l) $l=23.4 \mathrm{m}\mathrm{m}$. All cantilevers have a fixed width of $2.45$ $\mathrm{m}$$\mathrm{m}$ and a thickness of 350 $\mathsf{\mu }$$\mathrm{m}$.