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. Author manuscript; available in PMC: 2023 Jun 22.
Published in final edited form as: Proc SPIE Int Soc Opt Eng. 2019 Mar 4;10931:1093110. doi: 10.1117/12.2514579

Figure 6.

Figure 6.

a) Image of the surface of a portion of a broken MOEMS mirror. The via openings in the metal film are 5 μm wide, and on a 30 μm grid spacing. b) Image of cheek cells.