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. 2023 Jun 14;15(25):30591–30599. doi: 10.1021/acsami.3c02088

Table 1. Summary of the Etch Time, Measured Thickness, and Measured Width for Various Samples Fabricated.

Number Sample .Etch Time (s) t (μm) Wm (μm)
1 W1P25 400 0.5 1.3
2 W1P25 700 0.8 1.6
3 W2P40 800 1.0 2.8
4 W2P40 1300 1.6 3.2
5 W3P70 800 1.0 3.5
6 W3P70 1600 2.0 5.0