Table 1. Summary of the Etch Time, Measured Thickness, and Measured Width for Various Samples Fabricated.
Number | Sample | .Etch Time (s) | t (μm) | Wm (μm) |
---|---|---|---|---|
1 | W1P25 | 400 | 0.5 | 1.3 |
2 | W1P25 | 700 | 0.8 | 1.6 |
3 | W2P40 | 800 | 1.0 | 2.8 |
4 | W2P40 | 1300 | 1.6 | 3.2 |
5 | W3P70 | 800 | 1.0 | 3.5 |
6 | W3P70 | 1600 | 2.0 | 5.0 |