Table 1.

Specifications of the state of the art of monolithic integrated photonic platforms

	Silica waveguides235	Silicon-on-insulator37,235	Silicon nitride236	Lithium niobate on insulator237	Gallium arsenide238	Indium phosphide38	Silicon oxynitride239,240
Refractive index contrast	Low	High	Moderate	Moderate	Low	Low	Low, tunable
Losses	Ultralow	Moderate linear loss, High two-photon absorption	Low linear loss, low two-photon absorption	Moderate	Moderate	Moderate	Low linear loss, low two-photon absorption
Nonlinear index	Weak χ3	Strong χ3	Strong χ3	Strong χ2	Strong χ2	Strong χ2	Moderate χ3
Laser	N/A	N/A	N/A	N/A	Yes	Yes	N/A
Modulator	Low speed	High speed	Low speed	High speed	High speed	High speed	Low speed
Detector	N/A	Ge, High speed	N/A	N/A	High speed	High speed	N/A
Mode matching with optical fibers	Excellent	Poor	Moderate	Moderate	Poor	Poor	Moderate
CMOS compatibility	N/A	Excellent	Good	N/A	N/A	N/A	Good

N/A not applicable