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. 2023 Jun 26;23(13):5920. doi: 10.3390/s23135920

Figure 8.

Figure 8

(a) Two-dimensional beam scanner on SOI. A high-order grating is used in the ϕ direction and a low-order grating is used in the θ direction. (b) Cross-section of the grating coupler array. The SOI wafer has a 2 μm buried oxide layer and a 220 nm silicon top layer [39].