Figure 1.

The SAW device with split-electrode transducers and reflectors on ST-90°X quartz: (a) Top view schematic of a split-electrode IDTs delay-line consists of an input transmitter IDTs, an output receiver IDTs, and closed reflected gratings at both ends for wave energy recovery. (b) Top magnified view of a fabricated device after lift-off process includes part of a split-electrode IDT and reflected gratings. (c) The schematic cross-section of a SH-SAW device with the bi-layer waveguide. (d) The DI-water droplet was placed on the delay-line path, and the device was measured through GSG probes connected to a probe station.