Table 1.

Specifications of IDTs.

Device Parameter	Specification
Wavelength	16 μm × 8 (split-electrode design)
Input/output IDT set numbers	20/10
Overlapping aperture	20 λ
Delay-line path length	60 λ
Aperture of dummy strips	5 λ
Space between reflector and IDT	16/2 + 16 × 4 μm
Reflector numbers	60/40 strips
Au thickness	380~400 nm
ZnO thickness	300 nm