Table 2.

Cases of Parylene C/ZnO Waveguides.

Simulation Cases	Resonant Frequency (MHz)	Frequency Shift (MHz)
400 nm ZnO/IDT/quartz	39.174	0
1.5 μm Parylene C/400 nm ZnO/IDT/quartz	39.039	0.135
Experiment cases (Supplement S2)	Resonant frequency (MHz)	Frequency shift (MHz)
300 nm ZnO/IDT/quartz	38.808	0
1.5 μm Parylene C/300 nm ZnO/IDT/quartz	38.669	0.139
3.5 μm Parylene C/300 nm ZnO/IDT/quartz	37.810	0.997