Table 6.

ESTHER spectroscopy acceptance campaign results.

–	Resolution 1200 g/mm	Resolution 600 g/mm	Accuracy	Signal-to-Noise Ratio
Specifications and Requirements	0.25 nm	0.50 nm	5 pixels	>100
Test	0.23 nm @ 253.65 nm	0.47 nm @ 253.65 nm	4.5 pixels	3425