Fig. 3. Effect of probe shape and residual aberrations on the charge density image.

Simulated probe shapes (a–e) and net charge density images (f–j) while successively adding various aberrations: a, f a 30 mrad probe at 80 kV with no chromatic or geometric aberrations. b, g Adding chromatic aberrations (7.5 nm FWHM focal spread). c, h Adding 5 µm 3rd order spherical aberrations, Cs (also known as C₃₀). d, i Adding 1 nm C₁₀ (negative defocus), −10 nm C₂₃ (threefold astigmatism). e, j Changing C₂₃ to +15 nm. Images (a–e) share the same scale bar as in (a), and images (f–j) share the same scale bar as in (f).