Table 2.
Deposition parameter of Ti–Cu–N films.
| Sample Code |
Cu plate diameter (mm) | Deposition Time (Minutes) |
|---|---|---|
| S1 | 5 | 120 |
| S2 | 7.5 | 120 |
| S3 | 10 | 120 |
| S4 | 12.5 | 120 |
| S5 | 15 | 120 |
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.