Table 2. Computed Adsorption Energies of Metal Precursors RuCp2 and CoCp2 with Horizontal Binding Mode on H-Terminated and NHx-terminated Si(100) Surfacesa.
| RuCp2Ead/eV |
CoCp2Ead/eV |
|||
|---|---|---|---|---|
| (3 × 3) | horizontal | upright | horizontal | upright |
| H–Si(100) | –0.30 | –0.13 | –0.98 | –0.84 |
| NHx–Si(100) | –0.67 | –0.59 | –0.87 | –0.64 |
The (3 × 3) supercell is applied.