. 2023 Jul 7;127(28):13651–13658. doi: 10.1021/acs.jpcc.3c02933

Table 3. Computed Adsorption Energies of Metal Precursors RuCp₂ and CoCp₂ with Horizontal and Upright Binding Modes on SiN_x/Si(100), H:SiN_x/Si(100), and Bare Si(100) Surfaces.

Table 3. Computed Adsorption Energies of Metal Precursors RuCp2 and CoCp2 with Horizontal and Upright Binding Modes on SiNx/Si(100), H:SiNx/Si(100), and Bare Si(100) Surfaces.