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The comparison of the performances of the three technical means.
| Response | Reflection (90 Degree) |
Reflection (<90 Degree) |
Stability | Batch Fabrication | Cost | |
|---|---|---|---|---|---|---|
| Ultrathin InP buffer layer | medium | high | high | high | no | medium |
| Antireflection film deposition | high | low | medium | low | yes | high |
| Mie scattering AR nanostructure integration | high | low | low | high | yes | medium |
