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Scallops on the top side wall of the hole, with an opening of 80 μm (a) before optimizing DRIE parameters, the maximum width and depth of scallop were 3.41 μm and 959 nm, respectively; (b) the optimized DRIE parameters: the maximum width and depth of scallop are 2.13 μm and 540 nm, respectively (Reprinted with permission from Ref. [52], 2022, Feng, Liuhaodong).
