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Schematic illustration of the nano–micro fused chip fabrication: (a) transcription of the microwell structure onto the nanopillar chip using the NIL system; (b) detailed illustration of the imprint step. A 20 N force was applied to parallelize the nanopillar chip and microwell mold. A 60 N force was then applied to transcribe the microwell structure. (c) dimension specification of the mold microstructures and resulting microwell.
