Table 2.
Steps | Calculation process |
---|---|
Vlim calculation | Calculate the minimum value of voltage Vlim which must be applied at the electrodes in order to obtain an electric field larger than zero to avoid direct electron/positive-ion recombination |
Vop check | Choose a proper gas pressure so that the applied operational voltage Vop > Vlim |
Charge multiplication regime check | If Vop is such that the chamber is working in uncontrolled charge multiplication regime, decrease the pressure to be out of this regime, according to the Paschen curve |
Further pressure optimization | Further optimize the pressure to satisfy the required value, according to the electric field perturbation due to the produced charge |