Table 2. EUV Photoresist Formulations Based on Epoxy Negative Photoresists.
| Formulations | Molecular glass | PAG (wt %)a | 2-Aminoanthracene (wt %)b | Solvent |
|---|---|---|---|---|
| PR-1 | BPA-6-epoxy | 10 | 0 | PGMEA |
| PR-2 | BPA-6-epoxy | 10 | 10 | PGMEA |
| PR-3 | BPA-6-epoxy | 10 | 20 | PGMEA |
| PR-4 | BPA-6-epoxy | 10 | 30 | PGMEA |
| PR-5 | BPA-6-epoxy | 7.5 | 10 | PGMEA |
Weight percentage with respect to BPA-6-epoxy.
Weight percentage with respect to PAG.