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. 2023 Jul 23;8(30):26739–26748. doi: 10.1021/acsomega.2c07711

Table 2. EUV Photoresist Formulations Based on Epoxy Negative Photoresists.

Formulations Molecular glass PAG (wt %)a 2-Aminoanthracene (wt %)b Solvent
PR-1 BPA-6-epoxy 10 0 PGMEA
PR-2 BPA-6-epoxy 10 10 PGMEA
PR-3 BPA-6-epoxy 10 20 PGMEA
PR-4 BPA-6-epoxy 10 30 PGMEA
PR-5 BPA-6-epoxy 7.5 10 PGMEA
a

Weight percentage with respect to BPA-6-epoxy.

b

Weight percentage with respect to PAG.