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The different laser processes were evaluated for their impact on the damage morphology on the obtuse angle side of the microhole. The horizontal axis represents different scanning speeds: 80, 160, 240, and 320 mm/s, while the vertical axis represents laser powers of 12 W, 18 W, 24 W, and 30 W. Subfigure (a–p) show the cross sections of the obtuse side scanning electron microscope at different scanning speeds and laser powers.
