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. 2023 Aug 6;9(8):e19002. doi: 10.1016/j.heliyon.2023.e19002

Fig. 7.

Fig. 7

Si2p X-ray photoelectron spectrum of a film formed following (a) Si+, (b) SiCH5+, or (c) C+ ion beam injection to a substrate in conjunction with dimethylsilane. The substrate was 800 °C in all cases.