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. 2023 Aug 21;9:104. doi: 10.1038/s41378-023-00569-1

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© The Author(s) 2023

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a 3-D view, b1–b4 sideview. c1–c3 Optical images of the biosensor after fabrication of the focusing electrode pair, the sensing and trapping electrodes array, and the SU8 microchannel. d1–d5 Scanning electron microscope (SEMs) micrographs of the fabricated biosensor. d-1 The two set focusing electrodes, detection electrode, and control electrode embedded in SU-8 microchannel, d-2 a magnified view of the two-set focusing electrode, d-3 magnified view of one focusing electrode, d-4 detection and control electrodes, d-5 a magnified view of the detection IDE array