Ultrathin
Film (Wetting Layer) |
ZnO/Ag/ZnO |
RF and DC sputtering |
thickness: 20/6/20 nm |
sheet resistance: 3 Ω sq–1
|
(14) |
TiO2/Ag/TiO2
|
RF and DC sputtering |
thickness: 30/9.5/30 nm |
sheet resistance: 5.7 Ω sq–1
|
(15) |
WO3/Ag/WO3
|
thermal evaporation |
thickness: 30/12/30 nm |
sheet resistance: 7.22 Ω sq–1
|
(16) |
ITO/Ag/ITO |
RF and DC sputtering |
thickness: 55/14/55 nm |
sheet resistance: 4 Ω sq–1
|
(17) |
MoO3/Ag/MoO3
|
RF and DC sputtering |
thickness: 20/7.5/20 nm |
sheet resistance: 8 Ω sq–1
|
(18) |
Ultrathin Film (Doping) |
Mg0.28Zn0.72O/Ag/Mg0.28Zn0.72O |
RF sputtering
and E-beam Eevaporation |
thickness: 50/14/50 nm |
sheet resistance: 6.36 Ω sq–1
|
(19) |
AZO/Ag/AZO |
E-beam evaporation |
thickness: 25/11/25 nm |
sheet resistance: 5.34 Ω sq–1
|
(20) |
Ultrathin
Film (Metal Seed Layer) |
Ag/Ge/SiO2/Si |
E-beam evaporation |
thickness: 10/2/100 nm |
sheet resistance: 20 Ω sq–1
|
(21) |
Ag/Ge |
E-beam evaporation |
thickness: 100/1 nm |
resistivity: 2.58 μm cm |
(22) |
Ag/Ti |
RF sputtering |
thickness: 6 μm/5 nm |
sheet resistance: 0.023 Ω sq–1
|
(23) |
Ag/Al |
thermal evaporation |
thickness: 6/1 nm |
sheet resistance: 19.5 Ω sq–1
|
(24) |
Metal Nanomaterial |
AgNW |
chemical reduction |
diameter: 100–150 nm |
sheet resistance: ∼9 Ω sq–1
|
(8) |
|
|
length: >500 μm |
|
|
|
AgNW |
chemical reduction |
diameter: 40–100 nm |
sheet resistance: ∼8 Ω sq–1
|
(25) |
|
|
length: ∼10 μm |
|
|
|
AgNP |
chemical reduction |
diameter: 14 ± 3 nm |
sheet resistance: 9 ± 0.8 Ω sq–1
|
(26) |
AgNP |
chemical reduction |
diameter: <10 nm |
sheet resistance: 30 Ω sq–1
|
(27) |
|
CuNW |
chemical reduction |
diameter: 80–120 nm |
sheet resistance: 37 Ω sq–1
|
(28) |
|
|
length: ∼50 μm |
|
|
|
CuNW |
chemical reduction |
diameter: ∼46 nm |
sheet resistance: 52.7 Ω sq–1
|
(29) |
|
|
length: 37.7 μm |
|
|
|
CuNP |
chemical reduction |
diameter: ∼40 nm |
sheet resistance: 16.22 Ω sq–1
|
(30) |
CuNP |
chemical reduction |
diameter: ∼40 nm |
sheet resistance: 4.7 Ω sq–1
|
(31) |
|
AuNW (mesh) |
chemical reduction |
thickness: 193.7 ± 67.6 nm |
sheet resistance: 130.1 Ω sq–1
|
(32) |
|
|
pore size: 8–52 μm |
|
|
|
AuNP |
chemical reduction |
diameter: 3.2 nm |
sheet
resistance: 150 Ω sq–1
|
(33) |
Carbon-Based
Nanomaterial |
single-layer graphene |
mechanical exfoliation |
lateral size: 10 μm |
electron mobility: 10000 cm2 V–1 S1–
|
(34) |
single-layer graphene/multilayer graphene |
LPCVD |
0.335 nm for 1 layer |
electron
mobility: ∼4050 cm2 V–1 S–1
|
(35) |
|
single-layer graphene/multilayer graphene |
APCVD |
0.335 nm for 1 layer |
sheet
resistance: 1150–220 Ω sq–1
|
(36) |
|
|
|
electron mobility: 602.4–450.8 cm2 V–1 S1–
|
|
|
single-layer graphene/multilayer graphene |
PECVD |
0.335 nm for 1 layer |
sheet
resistance: 2661 Ω sq–1
|
(37) |
SWCNT |
blown aerosol CVD |
thickness: ∼500 nm |
sheet resistance: 40 Ω sq–1
|
(38) |
|
SWCNT |
aerosol CVD |
diameter: 1.3–2.0 nm |
sheet resistance: 84 Ω sq–1
|
(39) |
|
|
length: 1–5 μm |
|
|
|
MWCNT |
CVD |
diameter: <100 nm |
sheet resistance: 450 Ω sq–1
|
(40) |
|
|
film thickness: 6 nm |
|
|
|
MWCNT |
CVD |
diameter: ∼15 nm |
sheet resistance: ∼699 Ω sq–1
|
(41) |
|
|
length: 250–350 μm |
|
|
|
rGO |
reduction of GO produced by Hummers
method |
thickness: 10 nm |
electrical conductivity: 550 S cm–1
|
(42) |
rGO |
reduction of GO produced by Hummers method |
thickness: ∼0.9 nm |
sheet resistance: 103 Ω sq–1
|
(43) |
Conducting
Polymer |
PANI |
electropolymerization |
thickness: 5–20 μm |
sheet resistance: 1.3 Ω sq–1
|
(44) |
PANI |
chemical oxidative polymerization |
thickness: ∼250 nm |
sheet resistance: 4.83 Ω sq–1
|
(45) |
|
PEDOT |
electropolymerization |
thickness: ∼1 μm |
sheet resistance: 50 Ω sq–1
|
(46) |
|
|
|
electrical conductivity: 210 S cm–1
|
|
|
PEDOT |
electropolymerization |
thickness: 40–50 nm |
electrical conductivity: 10–1 S cm–1
|
(47) |
PEDOT:PSS |
chemical oxidative polymerization |
thickness: 40–50 nm |
electrical conductivity: 10–3 S cm–1
|
|
|
Ppy |
electropolymerization |
thickness: 6.5 μm |
electrical conductivity: 59.53 S cm–1
|
(48) |
Ppy |
chemical
oxidative polymerization |
particle diameter: ∼40 nm |
sheet resistance: 6.5 Ω sq–1
|
(49) |