| ALD | Atomic Layer Deposition |
| T-ALD | Thermal-ALD |
| PE-ALD | Plasma Enanched-ALD |
| NIOTs | Near Interface Oxide Traps |
| MOSFET | Metal Oxide Semiconductor Field Effect Transistor |
| MOS | Metal Oxide Semiconductor |
| IL | Interlayer |
| High-κ | High permittivity (κ) dielectrics |
| TEM | Transmission Electron Microscopy |
| AFM | Atomic Force Microscopy |
| SCM | Scanning Capacitance Microscopy |
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