Table 2.
Conditions of arc discharge plasma treatment.
Plasma-forming gas | N2 | |||
Pressure, Pa | 0.3 | |||
Treatment duration, min | 5 | 10 | 20 | 30 |
Discharge current, A | 5 | 5 | 5 | 5 |
Temperature in the chamber, °C | 35 | 46 | 59 | 80 |
Conditions of arc discharge plasma treatment.
Plasma-forming gas | N2 | |||
Pressure, Pa | 0.3 | |||
Treatment duration, min | 5 | 10 | 20 | 30 |
Discharge current, A | 5 | 5 | 5 | 5 |
Temperature in the chamber, °C | 35 | 46 | 59 | 80 |