Properties of semiconductor wafers.
| Material | Type | Doping | Surface orientation | Resistivity (Ω cm) | Dopant concentration (atoms per cm3) |
|---|---|---|---|---|---|
| Si | n-Type | Phosphorus | (100) | 0.001–0.005 | 1 × 1019–8 × 1019 a |
| 0.08–0.5 | 1 × 1016–1 × 1017 a | ||||
| 1–10 | 3 × 1014–4 × 1015 | ||||
| 10–20 | 2 × 1014–3 × 1014 | ||||
| Si | p-Type | Boron | (100) | 0.001–0.005 | 3 × 1019–1 × 1020 |
| 0.005–0.1 | 3 × 1017–2 × 1019a | ||||
| 1–10 | 1 × 1015–1 × 1016 | ||||
| 10–20 | 7 × 1014–1 × 1015 | ||||
| Si | Undoped | Undoped | (100) | >10 000 | Not specified |
| Si | n-Type | Arsenic | (100) | 0.001–0.005 | 1 × 1019–7 × 1019 |
| Antimony | (100) | 0.003–0.004 | 1 × 1019–2 × 1019 | ||
Not provided by manufacturer. Dopant concentration is approximated using the PV lighthouse resistivity calculator at T = 300 K.24