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. 2023 Jun 19;10(9):3393–3403. doi: 10.1039/d3mh00649b

Properties of semiconductor wafers.

Material Type Doping Surface orientation Resistivity (Ω cm) Dopant concentration (atoms per cm3)
Si n-Type Phosphorus (100) 0.001–0.005 1 × 1019–8 × 1019 a
0.08–0.5 1 × 1016–1 × 1017 a
1–10 3 × 1014–4 × 1015
10–20 2 × 1014–3 × 1014
Si p-Type Boron (100) 0.001–0.005 3 × 1019–1 × 1020
0.005–0.1 3 × 1017–2 × 1019a
1–10 1 × 1015–1 × 1016
10–20 7 × 1014–1 × 1015
Si Undoped Undoped (100) >10 000 Not specified
Si n-Type Arsenic (100) 0.001–0.005 1 × 1019–7 × 1019
Antimony (100) 0.003–0.004 1 × 1019–2 × 1019
a

Not provided by manufacturer. Dopant concentration is approximated using the PV lighthouse resistivity calculator at T = 300 K.24