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. 2023 Aug 23;28(17):6200. doi: 10.3390/molecules28176200

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© 2023 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

PMC Copyright notice

(a,b) Comparison of superconducting performance of films with different thicknesses under ALD and magnetron sputtering; (a) electronic diffusion coefficient D. Copyright 2019, IOP Publishing Ltd. (b) Superconducting coherence length. Copyright 2019, IOP Publishing Ltd. (c) Scanning electron microscope (SEM) image of the ALD/NbN nanowire with a linewidth ( $w)$ of 50 nm, showing exceptionally good uniformity. Scale bar, 100 nm. Copyright 2021, AIP Publishing. (d) The relationship between film thickness and the number of ALD cycles. Controlling the number of cycles allows for precise control of film thickness. Copyright 2021, AIP Publishing.