| AFM | Atomic Force Microscopy |
| a. u. | arbitrary unit |
| DC | Direct current |
| GUM | Guide to the expression of Uncertainty in Measurement |
| MCM | Monte Carlo Method |
| MCMC | Markov Chain Monte Carlo |
| Probability Distribution Functions | |
| PMMA | poly(methyl methacrylate) |
| POM-C | poly-oxymethylene in copolymer |
| SEM | Scanning Electron Microscopy |
| SI | International System of Units (SI for Système International) |
| SThM | Scanning Thermal Microscopy |
| TCR | Temperature Coefficient Ratio |