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Nominal chemical composition and chemical composition obtained from the XPS spectra at a depth of 10 nm for IZO6 and IZO6-Ar/H2.
| Nominal composition [at %] | IZO 6 [at %] | IZO6-Ar/H2 [at %] | |
|---|---|---|---|
| O | 56.8 | 49.3 | 49.0 |
| In | 27.5 | 31.8 | 31.9 |
| Zn | 15.8 | 18.9 | 19.1 |
| Zn/(In + Zn) | 0.36 | 0.373 | 0.375 |
| In:Zn | 1.76:1 | 1.68:1 | 1.67:1 |
