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. 2023 Sep 1;9(9):e19744. doi: 10.1016/j.heliyon.2023.e19744

Table 2.

Thickness, sheet resistance Rs and electrical resistivity ρ of IZO5, IZO6 IZO7 and IZO6-Ar/H2 thin films.

Sample Thickness [nm] Rs [kΩ/sq] ρ [Ohm cm]
IZO5 130 220 ± 2 2.8
IZO6 115 40 ± 1 0.45
IZO7 115 1129 ± 9 12.6
IZO6-Ar/H2 115 0.600 ± 0.01 0.0069