U11	U22	U33	U12	U13	U23
Cl1	0.0388 (2)	0.03527 (19)	0.0658 (3)	0.00513 (13)	−0.00686 (17)	−0.01076 (16)
Cl2	0.0497 (2)	0.03070 (18)	0.0608 (3)	−0.00776 (14)	−0.01108 (18)	0.00405 (15)
O1	0.0385 (5)	0.0339 (5)	0.0585 (7)	0.0032 (4)	−0.0120 (5)	0.0042 (5)
O2	0.0429 (6)	0.0320 (5)	0.0621 (7)	−0.0008 (4)	−0.0073 (5)	−0.0116 (5)
O3	0.0416 (6)	0.0449 (6)	0.0723 (8)	−0.0023 (5)	−0.0249 (6)	−0.0072 (6)
N3	0.0294 (5)	0.0297 (5)	0.0371 (6)	0.0000 (4)	−0.0023 (4)	−0.0008 (4)
N1	0.0295 (5)	0.0419 (6)	0.0393 (6)	−0.0021 (5)	−0.0075 (5)	0.0026 (5)
N2	0.0278 (5)	0.0345 (6)	0.0438 (6)	−0.0027 (4)	−0.0051 (5)	−0.0019 (5)
C10	0.0268 (6)	0.0282 (6)	0.0313 (6)	−0.0006 (5)	0.0004 (5)	−0.0009 (5)
C11	0.0294 (6)	0.0290 (6)	0.0397 (7)	0.0010 (5)	0.0023 (5)	−0.0010 (5)
C3	0.0273 (6)	0.0342 (6)	0.0258 (6)	−0.0031 (5)	0.0007 (5)	0.0009 (5)
C4	0.0299 (6)	0.0327 (6)	0.0335 (6)	−0.0009 (5)	−0.0010 (5)	−0.0027 (5)
C6	0.0290 (6)	0.0371 (7)	0.0396 (7)	−0.0004 (5)	−0.0039 (5)	0.0003 (6)
C2	0.0340 (6)	0.0304 (6)	0.0329 (6)	−0.0047 (5)	−0.0028 (5)	0.0039 (5)
C5	0.0323 (6)	0.0387 (7)	0.0374 (7)	−0.0054 (5)	−0.0035 (5)	−0.0036 (6)
C1	0.0357 (7)	0.0363 (7)	0.0396 (7)	0.0008 (5)	−0.0048 (6)	0.0065 (6)
C9	0.0387 (7)	0.0292 (6)	0.0483 (8)	−0.0009 (5)	−0.0021 (6)	−0.0018 (6)
C8	0.0413 (8)	0.0320 (7)	0.0549 (9)	0.0084 (6)	0.0016 (7)	0.0068 (6)
C7	0.0327 (7)	0.0436 (8)	0.0526 (9)	0.0074 (6)	−0.0066 (6)	0.0075 (7)
O1W	0.0418 (6)	0.0358 (5)	0.0542 (7)	0.0069 (4)	−0.0077 (5)	−0.0016 (5)