Table 6.
Process parameter of thermal dry oxidation.
| Process | Material | Parameters |
|---|---|---|
| Oxidation furnace | O2 |
T = 1050 °C, t = 3.5 h, O2 flow = 2 sccm (Inotherm diffusion furnace DS-3 900 PC/150-Germany) |
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.