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Process parameters for passivation of BSK lifto-off.
| Process | Material | Parameter |
|---|---|---|
| Acetone cleaning | Acetone Beaker 1 Acetone Beaker 2 |
5 min, 60 W 1 min, fresh Acetone |
| Cleaning bench | Isopropanol | Rinse off |
| QDR | DI | 2 min |
| SRD | DI N2 |
700 rpm, 3 min 2000 rpm, 4 min |
| Plasma stripper | O2 | 40 % O2, 350 W, 5 min |
