Table 4. Literature Review for Sputtering Techniques.

		Physical parameters
Material	Type	Temperature	Pressure	Crystal Structure	Morphology	Configuration	Electrolyte	Type	PW	SC	ED	PD	Capacitive retention @ cycles	Ref
RuO2	DC reactive		5 × 10–3 Torr	Amorphous	Smooth surface	Solid state	LixPOyNz	Symmetric	0 to 2	656.57 F/g @			53% @ 500	(120)
MoO3	Magnetron		2 × 10–5 mbar	Crystalline	Nanocluster	Liquid state (3 electrodes)	1 M Na2SO4		–1.0 to 1.0	70 F/g @ 10 mV/s			82% @ 1000	(121)
Graphene	Magnetron	620 °C		Hexagonal	Crumpled and folded		PVA-H3PO4	Symmetric	0 to 1.0	325 F/g @ 1 mV/s	13.9 Wh/kg	50 kW/kg	100% @ 5000	(122)
ZnO/CNT	Reactive magnetron		2 × 10–5 mbar	Crystalline	Macroporous	Liquid state (2 electrodes)	0.1 M TBAPC/DMF	Symmetric	–2.0 to 1.0	59 F/g @ 5 mV/s	13.1 Wh/kg	3.0 W/kg		(123)
CrN	Reactive DC magnetron		3.5 Pa	FCC	Wormlike	Liquid state (2 electrodes)	0.5 M H2SO4	Symmetric	0 to 0.8	6.5 mF/cm2 @ 1 mA/cm2	8.2 mWh/cm3	0.7 W/cm3	90% @ 20000	(124)
TiO2/FMWCNT	Reactive magnetron		2 × 10–5 mbar		Nanoparticles	Liquid state (2 electrodes)	0.5 M Na2SO4	Symmetric	–1 to 1	110 F/g @ 5 mV/s			70% @ 500	(125)
Graphene	Magnetron		3.0 Pa		Fluffy and corrugated	Liquid state (3 electrodes)	6 M KOH		0.1 to 0.6	122 F/g @ 1 A/g			99% @ 1000	(126)
CuO	Reactive RF magnetron		10–2 Torr	Monoclinic	Granular, porous morphology	Liquid state (3 electrodes)	6 M KOH		0 to 0.5	272 F/g @ 5 mV/s			85% @ 3000	(127)
CuO2	Reactive RF magnetron		10–2 Torr	Cubic	Granular, porous morphology	Liquid state (3 electrodes)	6 M KOH		0 to 0.5	215 F/g @ 5 mV/s			80% @ 3000	(127)
MnO2	DC magnetron		3 × 10–2 Torr	Tetragonal	Nanorods	Liquid state (2 electrodes)	1 M Na2SO4	Symmetric	0 to 0.8	203 F/g @ 2 mV/s	4.2 Wh/kg	151 W/kg	89.83% @ 5000	(128)
Mo2N	Reactive DC magnetron			FCC	Spinous shape	Liquid state (3 electrodes)	0.5 M Li2SO4		0.005 to 0.85	722 F/cm3 @ 5 mV/s			100% @ 2000	(129)
TiC		750 °C	10–2 mbar	FCC		Liquid state (3 electrodes)	1 M H2SO4		–0.6 to 0.3	103 mF/cm2				(130)
TiN	Reactive magnetron		2 Pa	FCC		Liquid state (2 electrodes)	0.5 M H2SO4	Symmetric	0 to 0.8	27.3 mF/cm2 @ 1 mA/cm2	17.6 mWh/cm3	10.8 W/cm3	98.2% @ 20000	(131)
MoS2	DC magnetron	300 °C	5 × 10–3 Torr	Hexagonal	Nanoworms	Liquid state (3 electrodes)	1 M Na2SO4		–0.2 to 0.6	138 F/g @ 1 A/g	12.26 Wh/kg	7.98 kW/kg	86% @ 5000	(132)
CrN	Reactive DC magnetron	300 °C	3 × 10–2 Torr	Cubic	Columnar platelet	Liquid state (3 electrodes)	1 M Na2SO4		0.0 to 1.2	41.6 F/g @ 5 mV/s			87% @ 2000	(133)
VN		450 °C	5 × 10–3 mbar	Cubic	Columnar	Liquid state (2 electrodes)	1 M KOH	Symmetric	–1 to −0.4	40 mF/cm2 @ 9.5 mA/cm2	2 μWh/cm2	10 mW/cm2	80% @ 3000	(134)
W2N	Reactive		10–2 Torr	FCC	Spherical grain	Liquid state (2 electrodes)	1 M H2SO4	Symmetric	0 to 1.1	163 F/g @ 0.5 mA/cm2	9.36 Wh/kg	674 kW/kg	90.46% @ 10000	(135)
W2N	Reactive magnetron		2.5 × 102 mbar	Cubic	Dense	Liquid state (3 electrodes)	1 M KOH		–1.0 to −0.4	550 mF/cm2 @ 2 mV/s			100% @ 1600	(100)
Mn/MnOx @ graphite	Reactive			Amorphous	Needle-like	Solid state	Polypropylene carbonate	Symmetric	0 to 2.2	11.71 mF/cm2 @ 0.03 mA/cm2	7.87 mWh/cm2	36.65 mW/cm2		(7)
Ag/NiCoP	Magnetron		0.25 Pa	Hexagonal	Nanosheets	Solid state	PVA-KOH	Symmetric	0 to 1.5	6150 mF/cm2	0.254 mWh/cm2	18.8 mW/cm2	73% @ 4000	(136)
Cu3N/MoS2	Magnetron			MoS2 (hexagonal) and Cu3N (cubic)	Nanoflakes	Liquid state (2 electrodes)	1 M Na2SO4		0 to 1.0	215.47 F/g @ 0.5 A/g	30 Wh/kg	138 W/kg	90% @ 2000	(137)