Table 2. Photoresist Combinations.
Sample ID | DETC [wt %] | Rh NPs [wt %] | PETA [mM] | DMAc [μL] |
---|---|---|---|---|
Bare-PI0.125 | 0.125 | - | 3.77 | 80 |
Bare-PI0.5 | 0.500 | - | 3.77 | 80 |
Bare-PI2 | 2.000 | - | 3.77 | 80 |
Rh–PI0.125 | 0.125 | 1.0 | 3.77 | 80 |
Rh–PI0.5 | 0.500 | 1.0 | 3.77 | 80 |
Rh–PI2 | 2.000 | 1.0 | 3.77 | 80 |